Four fully automated wavelength dispersive spectrometers (WDS) are equipped with 2 crystals and are capable of quantifying elements ranging from boron to uranium (Standards). Concentrations of at least 0.10 wt % can be measured to within ±1% of the measured abundance. Elements present in smaller concentrations can also be measured with somewhat less precision.

The energy dispersive spectrometer (EDS) collects a full spectrum of x-rays at once and is capable of rapidly examining up to 8 elements at one time.
Both EDS and WDS can be used to obtain high-precision x-ray maps and line scans of spatial variation in chemical composition.

The EMP is also equipped with backscattered electron, secondary electron, and cathodoluminescence (CL) detectors capable of producing "real time" images, or automated images in tandem with x-ray mapping to further characterize the area of interest.

A fully automated stage, capable of holding up to nine one-inch round samples (or six petrographic sections) has reproducibility of less than one micron. Unmounted samples up to 15 cm in diameter and 5 cm high can also be accommodated. In order to obtain good quantitative results the samples should be flat and well polished.