The EPMA is equipped with a Noran Instruments "Pioneer" Energy Dispersive Spectrometer (EDS).
The Si(Li) detector has a working area of 10 mm2, a Be Window, and a 143 eV (Mn Ka) resolution.
The unit is fully automated, and integrated into the JEOL operating software. This integration allows 8 elemental x-ray maps or "regions of interest" to be mapped simultaneously in addition to the 4 WDS x-ray signals.